The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 21, 2015
Filed:
Mar. 28, 2012
Merritt Funk, Austin, TX (US);
Lee Chen, Cedar Creek, TX (US);
Barton Lane, Austin, TX (US);
Jianping Zhao, Austin, TX (US);
Radha Sundararajan, Dripping Springs, TX (US);
Merritt Funk, Austin, TX (US);
Lee Chen, Cedar Creek, TX (US);
Barton Lane, Austin, TX (US);
Jianping Zhao, Austin, TX (US);
Radha Sundararajan, Dripping Springs, TX (US);
Tokyo Electron Limited, Tokyo, JP;
Abstract
A method of generating a signal representing with an ion energy analyzer for use in determining an ion energy distribution of a plasma. The ion energy analyzer, used for determining an ion energy distribution of a plasma, includes a first grid and a second grid that is spaced away from and electrically isolated from the first grid. The first grid forms a first surface of the ion energy analyzer and is positioned to be exposed to the plasma. The first grid includes a first plurality of openings, which are dimensioned to be less than a Debye length for the plasma. A voltage source and an ion current meter are operably coupled to the second grid, the latter of which is configured to measure an ion flux onto the ion collector and to transmit a signal that represents the measured ion flux. The method includes selectively and variably biasing the second grid relative to the first grid.