The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 21, 2015
Filed:
Oct. 26, 2011
Rik Jonckheere, Muizen, BE;
Anne-marie Goethals, Oud-Heverlee, BE;
Gian Francesco Lorusso, Overijse, BE;
Ivan Pollentier, Langdorp, BE;
Rik Jonckheere, Muizen, BE;
Anne-Marie Goethals, Oud-Heverlee, BE;
Gian Francesco Lorusso, Overijse, BE;
Ivan Pollentier, Langdorp, BE;
IMEC, Leuven, BE;
Abstract
A sensor for sensing contamination in an application system is disclosed. In one aspect, the sensor comprises a capping layer. The sensor is adapted to cause a first reflectivity change upon initial formation of a first contamination layer on the capping layer when the sensor is provided in the system. The first reflectivity change is larger than an average reflectivity change upon formation of a thicker contamination layer on the capping layer and larger than an average reflectivity change upon formation of an equal contamination on the actual mirrors of the optics of the system.