The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 14, 2015
Filed:
Sep. 07, 2011
Applicants:
Yuichi Ohsawa, Yokohama, JP;
Shigeki Takahashi, Yokohama, JP;
Junichi Ito, Yokohama, JP;
Daisuke Saida, Fuchu, JP;
Kyoichi Suguro, Yokohama, JP;
Hiroaki Yoda, Sagamihara, JP;
Inventors:
Yuichi Ohsawa, Yokohama, JP;
Shigeki Takahashi, Yokohama, JP;
Junichi Ito, Yokohama, JP;
Daisuke Saida, Fuchu, JP;
Kyoichi Suguro, Yokohama, JP;
Hiroaki Yoda, Sagamihara, JP;
Assignee:
KABUSHIKI KAISHA TOSHIBA, Tokyo, JP;
Primary Examiner:
Int. Cl.
CPC ...
H01L 43/12 (2006.01); H01L 29/82 (2006.01);
U.S. Cl.
CPC ...
H01L 43/12 (2013.01); H01L 29/82 (2013.01);
Abstract
According to one embodiment, a method of manufacturing a multilayer film, the method includes forming a first layer, forming a second layer on the first layer, and transcribing a crystal information of one of the first and second layers to the other one of the first and second layers by executing a GCIB-irradiation to the second layer.