The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 14, 2015
Filed:
Mar. 21, 2012
Yudo Sugawara, Oshu, JP;
Yudo Sugawara, Oshu, JP;
TOKYO ELECTRON LIMITED, Tokyo, JP;
Abstract
A lid opening and closing device includes a table configured to mount a carrier thereon with a front surface of a carrier lid configured to face toward a conveying gateway, a gas injecting hole provided in an opposing surface portion and configured to supply a purge gas used in removing particles adhering to the carrier lid, an advancing/retreating mechanism configured to move the carrier placed on the table toward and away from the opposing surface portion, and a control unit configured to output a control signal such that a purge gas is supplied from the gas injecting hole to the carrier lid, wherein the carrier is positioned such that the distance between the opposing surface portion and the carrier lid is 5 mm or less and the carrier lid and the opposing surface portion are spaced apart from each other, and the carrier lid is subsequently removed from the carrier.