The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 14, 2015
Filed:
Jun. 28, 2012
Yukinori Aburatani, Toyama, JP;
Toshiya Shimada, Toyama, JP;
Kenji Shinozaki, Toyama, JP;
Tomihiro Amano, Toyama, JP;
Hiroshi Ashihara, Toyama, JP;
Hidehiro Yanai, Toyama, JP;
Masahiro Miyake, Toyama, JP;
Shin Hiyama, Toyama, JP;
Yukinori Aburatani, Toyama, JP;
Toshiya Shimada, Toyama, JP;
Kenji Shinozaki, Toyama, JP;
Tomihiro Amano, Toyama, JP;
Hiroshi Ashihara, Toyama, JP;
Hidehiro Yanai, Toyama, JP;
Masahiro Miyake, Toyama, JP;
Shin Hiyama, Toyama, JP;
Hitachi Kokusai Electric, Inc., Tokyo, JP;
Abstract
A substrate processing apparatus capable of increasing the life span of a lamp for heating a substrate is provided. The substrate processing apparatus includes: a light receiving chamber for processing a substrate; a substrate support unit inside the light receiving chamber; a lamp including an electrical wire, and a seal accommodating the electrical wire to hermetically seal the lamp with a gas therein, the lamp irradiating the substrate with a light; a lamp receiving unit outside the light receiving chamber to accommodate the lamp therein, the lamp receiving unit including a lamp connector connected to the lamp to supply an electric current through the electrical wire, a heat absorption member including a material having a thermal conductivity higher than that of the seal, and a base member fixing the heat absorption member; and an external electrical wire connected to the lamp connector to supply current to the lamp connector.