The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 14, 2015
Filed:
Oct. 27, 2014
Applicant:
Strasbaugh, San Luis Obispo, CA (US);
Inventors:
Thomas Brake, San Luis Obispo, CA (US);
Thomas A. Walsh, San Luis Obispo, CA (US);
Assignee:
Strasbaugh, San Luis Obispo, CA (US);
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/30 (2006.01); H01L 21/46 (2006.01); H01L 21/304 (2006.01); H01L 21/02 (2006.01); H01L 21/683 (2006.01);
U.S. Cl.
CPC ...
H01L 21/304 (2013.01); H01L 21/02013 (2013.01); H01L 21/02016 (2013.01); H01L 21/02021 (2013.01); H01L 21/6835 (2013.01);
Abstract
A method of processing a device wafer in a wafer stack by chucking the wafer stack device side down and grinding the exposed side of the carrier wafer to parallel with the device wafer, and thereafter flipping the wafer stack and chucking the wafer stack carrier side down and grinding residual silicon from the device wafer.