The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 14, 2015

Filed:

Dec. 20, 2011
Applicants:

Hui-chan Yun, Uiwang-si, KR;

Taek-soo Kwak, Uiwang-si, KR;

Bong-hwan Kim, Uiwang-si, KR;

Jin-hee Bae, Uiwang-si, KR;

Jung-kang OH, Uiwang-si, KR;

Sang-hak Lim, Uiwang-si, KR;

Dong-il Han, Uiwang-si, KR;

Sang-kyun Kim, Uiwang-si, KR;

Jin-wook Lee, Uiwang-si, KR;

Inventors:

Hui-Chan Yun, Uiwang-si, KR;

Taek-Soo Kwak, Uiwang-si, KR;

Bong-Hwan Kim, Uiwang-si, KR;

Jin-Hee Bae, Uiwang-si, KR;

Jung-Kang Oh, Uiwang-si, KR;

Sang-Hak Lim, Uiwang-si, KR;

Dong-Il Han, Uiwang-si, KR;

Sang-Kyun Kim, Uiwang-si, KR;

Jin-Wook Lee, Uiwang-si, KR;

Assignee:

CHEIL INDUSTRIES, INC., Gumi-si, Kyeongsangbuk-do, KR;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/02 (2006.01); C09D 183/02 (2006.01); C08L 83/16 (2006.01); B32B 9/00 (2006.01); C09D 183/00 (2006.01); B05D 5/12 (2006.01); B05D 5/00 (2006.01); C09D 183/08 (2006.01);
U.S. Cl.
CPC ...
H01L 21/02282 (2013.01); C08L 83/16 (2013.01); C09D 183/02 (2013.01); H01L 21/02164 (2013.01); H01L 21/02222 (2013.01); B05D 5/00 (2013.01); B05D 5/12 (2013.01); B32B 9/00 (2013.01); C09D 183/00 (2013.01); C09D 183/08 (2013.01); Y10T 428/24355 (2015.01);
Abstract

A composition for forming a silica layer, a method of manufacturing the composition, a silica layer prepared using the composition, and a method of manufacturing the silica layer, the composition including hydrogenated polysilazane, hydrogenated polysiloxazane, or a combination thereof, wherein a concentration of a sum of hydrogenated polysilazane and hydrogenated polysiloxazane having a weight average molecular weight, reduced to polystyrene, of greater than or equal to about 50,000 is about 0.1 wt % or less, based on a total amount of the hydrogenated polysilazane and hydrogenated polysiloxazane.


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