The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 14, 2015
Filed:
Feb. 16, 2010
Bastiaan Andreas Wilhelmus Hubertus Knarren, Nederweert-Eind, NL;
Raymond Turk, Riethoven, NL;
Allard Eelco Kooiker, Waalre, NL;
Bastiaan Andreas Wilhelmus Hubertus Knarren, Nederweert-Eind, NL;
Raymond Turk, Riethoven, NL;
Allard Eelco Kooiker, Waalre, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
A detector module () is described that includes at least one detector () for sensing photon radiation, an electronic circuit () coupled to the at least one detector (), and a housing () having a first and a second body (), each having a bottom part () and an at least partially cylindrical part () extending from the bottom part (), wherein the at least partially cylindrical part () of the first body () is thermally coupled with the at least partially cylindrical part () of the second body (), wherein the at least partially cylindrical part () of the first body () extends towards the bottom part () of the second body (), and wherein the electronic circuit () is arranged inside the housing (). A lithographic apparatus including the detector module () is also described.