The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 14, 2015
Filed:
Dec. 07, 2010
Hong Shih, Walnut, CA (US);
Armen Avoyan, Glendale, CA (US);
Shashank C. Deshmukh, San Ramon, CA (US);
David Carman, San Jose, CA (US);
Hong Shih, Walnut, CA (US);
Armen Avoyan, Glendale, CA (US);
Shashank C. Deshmukh, San Ramon, CA (US);
David Carman, San Jose, CA (US);
Lam Research Corporation, Fremont, CA (US);
Abstract
A method for cleaning metallic contaminants from an upper electrode used in a plasma chamber. The method comprises a step of soaking the upper electrode in a cleaning solution of concentrated ammonium hydroxide, hydrogen peroxide and water. The cleaning solution is free of hydrofluoric acid and hydrochloric acid. The method further comprises an optional step of soaking the upper electrode in dilute nitric acid and rinsing the cleaned upper electrode.