The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 14, 2015
Filed:
Aug. 21, 2013
Canon Kabushiki Kaisha, Tokyo, JP;
CANON KABUSHIKI KAISHA, Tokyo, JP;
Abstract
Provided is an imaging apparatus for acquiring a tomographic image of an object to be inspected based on light obtained by combining return light from the object illuminated with measuring light and reference light corresponding to the measuring light, the imaging apparatus including: a reference-light amount changing unit provided in an optical path of the reference light, for changing a reference-light amount of the reference light; and a control unit for controlling the reference-light amount changing means so as to control the reference-light amount within a predetermined range and an image quality of the tomographic image within a predetermined image-quality evaluation range.