The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 07, 2015
Filed:
May. 18, 2012
Tetsuji Ohsawa, Tokyo, JP;
Naoya Ishigaki, Tokyo, JP;
Tetsuji Ohsawa, Tokyo, JP;
Naoya Ishigaki, Tokyo, JP;
Hitachi High-Technologies Corporation, Tokyo, JP;
Abstract
To improve an apparatus reliability by applying a voltage suitable to a situation, a charged-particle-beam apparatusof the present invention includes: a sample stage; an electrostatic chuck; and an electrostatic-chuck controlling unit, and generates an image of a sampleby irradiating the sampleheld on the sample stageby the electrostatic chuckwith an electron beam. The electrostatic-chuck controlling unit, when the electrostatic chuckholds the sample, applies a preset initial voltage to a chuck electrode of the electrostatic chuck; determines whether or not the sampleis normally clamped to the electrostatic chuck; and increases the voltage applied to the chuck electrode until determining that the sampleis clamped normally to the electrostatic chuckif determining that the sampleis not clamped normally to the electrostatic chuck