The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 07, 2015
Filed:
Nov. 11, 2013
Applicant:
Intermolecular, Inc., San Jose, CA (US);
Inventors:
Thomas R. Boussie, Santa Clara, CA (US);
Tony P. Chiang, Campbell, CA (US);
Alexander Gorer, Los Gatos, CA (US);
David E. Lazovsky, Los Gatos, CA (US);
Assignee:
Intermolecular, Inc., San Jose, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C40B 50/00 (2006.01); H01L 21/66 (2006.01); C23C 14/54 (2006.01); C23C 16/52 (2006.01); H01L 21/67 (2006.01); H01L 21/768 (2006.01);
U.S. Cl.
CPC ...
H01L 22/20 (2013.01); C23C 14/54 (2013.01); C23C 16/52 (2013.01); H01L 21/6715 (2013.01); H01L 21/76849 (2013.01); Y10S 438/913 (2013.01); Y10S 438/907 (2013.01); H01L 2924/0002 (2013.01);
Abstract
The present invention provides methods and systems for discretized, combinatorial processing of regions of a substrate such as for the discovery, implementation, optimization, and qualification of new materials, processes, and process sequence integration schemes used in integrated circuit fabrication. A substrate having an array of differentially processed regions thereon is processed by delivering materials to or modifying regions of the substrate.