The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 07, 2015
Filed:
Apr. 27, 2012
Applicants:
Harald Gross, Langebrueck, DE;
Erwin Zschieschang, Dresden, DE;
Inventors:
Harald Gross, Langebrueck, DE;
Erwin Zschieschang, Dresden, DE;
Assignee:
VON ARDENNE Anlagentechnik GmbH, Dresden, DE;
Primary Examiner:
Int. Cl.
CPC ...
H01J 1/02 (2006.01); H01J 37/32 (2006.01); H01L 21/67 (2006.01); H01J 7/26 (2006.01);
U.S. Cl.
CPC ...
H01J 37/32522 (2013.01); H01L 21/67115 (2013.01); H01J 7/26 (2013.01);
Abstract
A substrate treatment installation includes an installation chamber and a light source for the exposure of substrates to light. The light source is arranged in the interior of the substrate treatment installation and includes at least one discharge lamp arranged in a housing, which is permeable to light at least in sections and has a vacuum-tight cavity for accommodating the lamp, and also at least one reflector element arranged in spatial proximity to the at least one lamp and having an electrical connection.
Published as:
DE102011081749A1; WO2012146715A1; CN103518257A; EP2702608A1; US2014070689A1; US9076635B2; DE102011081749B4; CN103518257B;