The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 07, 2015
Filed:
Nov. 14, 2010
Youssef A. Loldj, Sunnyvale, CA (US);
Maxime Cayer, Chandler, AZ (US);
Jay J. Jung, Sunnyvale, CA (US);
Shaun Crawford, San Ramon, CA (US);
Dana Tribula, Menlo Park, CA (US);
Daniel O. Clark, Pleasanton, CA (US);
Youssef A. Loldj, Sunnyvale, CA (US);
Maxime Cayer, Chandler, AZ (US);
Jay J. Jung, Sunnyvale, CA (US);
Shaun Crawford, San Ramon, CA (US);
Dana Tribula, Menlo Park, CA (US);
Daniel O. Clark, Pleasanton, CA (US);
APPLIED MATERIALS, INC., Santa Clara, CA (US);
Abstract
Methods and apparatus for enhanced control, monitoring and recording of incoming chemical and power use, and emissions of electronic device manufacturing systems are provided. In some embodiments, integrated sub-fab system systems may monitor the energy usage of the sub-fab equipment. The tool can enter many different depths of energy savings modes such as idle (shallow energy savings where production equipment can recover to normal production with no quality or throughput impact in seconds), sleep (deeper energy savings where production equipment can recover in minutes), or hibernate (where production equipment may require hours to recover not to have impact on quality, or throughput) for the system. In some embodiments, the system may monitor and display all gas emissions in a sub-fab as well as the Semi S23 method reporting of COequivalent emission. The system may monitor effluent process gases and energy use from the process tool and sub-fab equipment.