The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 07, 2015
Filed:
Jun. 15, 2011
Satoshi Morita, Koshi, JP;
Nobuhiro Ogata, Koshi, JP;
Shuichi Nagamine, Koshi, JP;
Kenji Kiyota, Koshi, JP;
Satoshi Morita, Koshi, JP;
Nobuhiro Ogata, Koshi, JP;
Shuichi Nagamine, Koshi, JP;
Kenji Kiyota, Koshi, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
Disclosed is a liquid processing apparatus which includes: a plurality of liquid processing units to supply a processing liquid to an object to be processed and liquid-process the object; a common exhaust path to discharge atmospheres in the plurality of liquid processing units; an individual exhaust path to connect the common exhaust path with each of the liquid processing units; an opening-closing mechanism provided on the individual exhaust path to be openable; and an air injecting port to inject an air into the common exhaust path. An injection amount adjusting valve is provided on the common exhaust path to adjust the flow rate of the air injected from the air injecting port. A controller controls an opening degree of the injection amount adjusting valve based on an opening-closing state of the opening-closing mechanism.