The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 07, 2015
Filed:
May. 16, 2012
Silvia DE Dea, San Diego, CA (US);
Michael Varga, Fallbrook, CA (US);
Alexander I. Ershov, Escondido, CA (US);
Robert L. Morse, Vista, CA (US);
Silvia De Dea, San Diego, CA (US);
Michael Varga, Fallbrook, CA (US);
Alexander I. Ershov, Escondido, CA (US);
Robert L. Morse, Vista, CA (US);
ASML Netherlands B.V., , NL;
Abstract
A collector mirror of an extreme ultraviolet light source is cleaned by removing the collector mirror from a chamber of the extreme ultraviolet light source; mounting the collector mirror to a carrier; inserting the carrier with the collector mirror into a cleaning tank; applying a cleaning agent to a reflective surface of the collector mirror by spraying the cleaning agent through a plurality of nozzles directed toward the collector mirror reflective surface until the collector mirror reflective surface is clean; rinsing the applied cleaning agent from the collector mirror reflective surface; and drying the collector mirror reflective surface.