The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 30, 2015

Filed:

Feb. 09, 2010
Applicants:

Makoto Sasaki, Osaka, JP;

Takeyoshi Masuda, Osaka, JP;

Inventors:

Makoto Sasaki, Osaka, JP;

Takeyoshi Masuda, Osaka, JP;

Assignee:

SUMITOMO ELECTRIC INDUSTRIES, LTD., Osaka-shi, Osaka, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C30B 21/02 (2006.01); H01L 29/06 (2006.01); C30B 29/36 (2006.01); H01L 29/04 (2006.01); H01L 29/66 (2006.01); H01L 29/78 (2006.01); H01L 23/544 (2006.01); H01L 29/16 (2006.01);
U.S. Cl.
CPC ...
H01L 29/0657 (2013.01); C30B 29/36 (2013.01); H01L 29/045 (2013.01); H01L 29/1608 (2013.01); H01L 29/66068 (2013.01); H01L 29/7802 (2013.01); H01L 23/544 (2013.01); H01L 2223/54406 (2013.01); H01L 2223/5442 (2013.01); H01L 2223/54433 (2013.01); H01L 2223/54493 (2013.01); H01L 2924/0002 (2013.01);
Abstract

A SiC substrate includes a first orientation flat parallel to the <11-20> direction, and a second orientation flat being in a direction intersecting the first orientation flat and being different from the first orientation flat in length. An alternative SiC substrate has a rectangular plane shape, and a main surface of the substrate includes a first side parallel to the <11-20> direction, a second side in a direction perpendicular to the first side, and a third side connecting the first side to the second side. A length of the third side projected in a direction in which the first side extends is different from a length of the third side projected in a direction in which the second side extends.


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