The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 30, 2015

Filed:

Jan. 18, 2012
Applicants:

Robert E. Parks, Tucson, AZ (US);

Robert A. Smythe, Middleton, CT (US);

Peng Su, Tucson, AZ (US);

James H. Burge, Tucson, AZ (US);

Roger Angel, Tucson, AZ (US);

Inventors:

Robert E. Parks, Tucson, AZ (US);

Robert A. Smythe, Middleton, CT (US);

Peng Su, Tucson, AZ (US);

James H. Burge, Tucson, AZ (US);

Roger Angel, Tucson, AZ (US);

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
G01B 11/24 (2006.01); G01M 11/00 (2006.01); G01M 11/02 (2006.01); G01B 11/25 (2006.01);
U.S. Cl.
CPC ...
G01M 11/005 (2013.01); G01M 11/0264 (2013.01); G01B 11/2513 (2013.01);
Abstract

A non-contact metrology system utilizes a display that can be programmed with a plurality of targets. The display targets shine on a specular surface and the reflected targets are detected by an imaging device. Based on the display pattern and the expected location of the reflected pattern, it is possible to characterize the reflective surface. The displayed pattern can be a regular array of targets and the reflected pattern detected by the imaging device is an irregular display of targets whose locations are based on the particular display pattern, the location of the display system and imaging device and the nature of the surface. Deviations of the actual location of targets from the expected location of targets is indicative of unexpected variations in the surface. Alternatively, the display has an irregular pattern of targets such that the reflected signals result in a regularly spaced array detected by the imaging device.


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