The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 23, 2015
Filed:
Oct. 08, 2010
Applicants:
Alexander I. Ershov, Escondido, CA (US);
Robert L. Morse, Vista, CA (US);
William N. Partlo, Poway, CA (US);
Christopher P. Pate, San Diego, CA (US);
Inventors:
Alexander I. Ershov, Escondido, CA (US);
Robert L. Morse, Vista, CA (US);
William N. Partlo, Poway, CA (US);
Christopher P. Pate, San Diego, CA (US);
Assignee:
ASML Netherlands B.V., Veldhoven, NL;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G02B 7/02 (2006.01); G02B 3/12 (2006.01); G02B 1/06 (2006.01); H05G 2/00 (2006.01); G02B 7/00 (2006.01); G03F 7/20 (2006.01);
U.S. Cl.
CPC ...
H05G 2/008 (2013.01); G02B 7/008 (2013.01); G03F 7/70033 (2013.01); G03F 7/70891 (2013.01);
Abstract
Devices are described herein which may comprise an optic having a non-planar surface, the non-planar surface having an optically active portion; and a flow guide directing gas upon the non-planar surface to produce turbulent flow on at least a portion of the optically active portion of the non-planar surface to cool the optic.