The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 23, 2015

Filed:

Aug. 14, 2013
Applicant:

International Business Machines Corporation, Armonk, NY (US);

Inventors:

Yu-Ming Lin, West Harrison, NY (US);

Jeng-Bang Yau, Yorktown Heights, NY (US);

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/16 (2006.01); H01L 21/02 (2006.01); H01L 29/66 (2006.01); H01L 29/786 (2006.01);
U.S. Cl.
CPC ...
H01L 29/16 (2013.01); H01L 21/02378 (2013.01); H01L 21/02381 (2013.01); H01L 21/0242 (2013.01); H01L 21/02488 (2013.01); H01L 21/02527 (2013.01); H01L 21/02656 (2013.01); H01L 29/66742 (2013.01); H01L 29/78603 (2013.01); H01L 29/78684 (2013.01); H01L 29/1606 (2013.01);
Abstract

Graphene- and/or carbon nanotube-based radiation-hard transistor devices and techniques for the fabrication thereof are provided. In one aspect, a method of fabricating a radiation-hard transistor is provided. The method includes the following steps. A radiation-hard substrate is provided. A carbon-based material is formed on the substrate wherein a portion of the carbon-based material serves as a channel region of the transistor and other portions of the carbon-based material serve as source and drain regions of the transistor. Contacts are formed to the portions of the carbon-based material that serve as the source and drain regions of the transistor. A gate dielectric is deposited over the portion of the carbon-based material that serves as the channel region of the transistor. A top-gate contact is formed on the gate dielectric.


Find Patent Forward Citations

Lin, Yu-Ming. (2015). Radiation hardened transistors based on graphene and carbon nanotubes (U.S. Patent No. 9064776). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/9064776

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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