The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 23, 2015

Filed:

Aug. 20, 2007
Applicants:

Gunnar Sommer, Berlin, DE;

Jörn Kamps, Berlin, DE;

Inventors:

Gunnar Sommer, Berlin, DE;

Jörn Kamps, Berlin, DE;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01Q 60/06 (2010.01); G02B 21/08 (2006.01); B82Y 35/00 (2011.01); G02B 21/00 (2006.01); G01Q 30/02 (2010.01);
U.S. Cl.
CPC ...
G02B 21/08 (2013.01); B82Y 35/00 (2013.01); G02B 21/002 (2013.01); G01Q 30/025 (2013.01);
Abstract

The invention relates to an apparatus and a method for examining a specimen by means of probe microscopy, in particular scanning probe microscopy. The apparatus comprises a probe microscope device which has a specimen holder for holding a specimen to be examined, a measurement probe and a displacement unit which is configured to displace the specimen holder and the measurement probe relative to one another for an examination of the specimen by means of probe microscopy, and comprises a condenser illumination and also an optical system which is arranged downstream of the condenser illumination and is configured to project condenser light, which is emitted by the condenser illumination in a condenser light path, into the region of the specimen holder for optical microscopy of the specimen to be examined, while at least partially maintaining condenser light parameters with which the condenser light is emitted by the condenser illumination.


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