The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 23, 2015
Filed:
Nov. 08, 2013
Adam L. Friedman, Silver Spring, MD (US);
F. Keith Perkins, Alexandria, VA (US);
Enrique Cobas, Capitol Heights, MD (US);
Paul M Campbell, Alexandria, VA (US);
Glenn G. Jernigan, Waldorf, MD (US);
Berend T Jonker, Davidsonville, MD (US);
Adam L. Friedman, Silver Spring, MD (US);
F. Keith Perkins, Alexandria, VA (US);
Enrique Cobas, Capitol Heights, MD (US);
Paul M Campbell, Alexandria, VA (US);
Glenn G. Jernigan, Waldorf, MD (US);
Berend T Jonker, Davidsonville, MD (US);
The United States of America, as represented by the Secretary of the Navy, Washington, DC (US);
Abstract
A method of making a low-dimensional material chemical vapor sensor comprising exfoliating MoS, applying the monolayer flakes of MoSonto a SiO/Si wafer, applying a methylmethacrylate (MMA)/polymethylmethacrylate (PMMA) film, defining trenches for the deposition of metal contacts, and depositing one of Ti/Au, Au, and Pt in the trench and resulting in a MoSsensor. A low-dimensional material chemical vapor sensor comprising monolayer flakes of MoS, trenches in the SiO/Si wafer, metal contacts in the trenches, and thereby resulting in a MoSsensor. A full spectrum sensing suite comprising similarly fabricated parallel sensors made from a variety of low-dimensional materials including graphene, carbon nanotubes, MoS, BN, and the family of transition metal dichalcogenides. The sensing suites are small, robust, sensitive, low-power, inexpensive, and fast in their response to chemical vapor analytes.