The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 23, 2015

Filed:

Apr. 04, 2014
Applicant:

Zhejiang University, Hangzhou, CN;

Inventors:

Kaiwei Wang, Hangzhou, CN;

Jian Bai, Hangzhou, CN;

Yibing Shen, Hangzhou, CN;

Yongying Yang, Hangzhou, CN;

Assignee:

ZHEJIANG UNIVERSITY, Zhejiang, CN;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01B 11/02 (2006.01); G01B 9/02 (2006.01); G01B 11/24 (2006.01); G01M 11/00 (2006.01);
U.S. Cl.
CPC ...
G01B 9/02041 (2013.01); G01B 11/2441 (2013.01); G01B 9/02039 (2013.01); G01M 11/005 (2013.01);
Abstract

The present invention discloses a wavelength scanning interferometer and a method for an aspheric surface measurement. The wavelength scanning interferometer comprises a set of tunable lasers () used as a light source, a Twyman-Green interferometer used for generating interference fringes, a translation platform () used for scanning an optical path difference along an optical axis, an image card () used for converting interference data to a digital signal and transmitting the digital signal to a computer (), and a data card () used for synchronizing the actions of a CCD camera () and the translation platform (). Different from the traditional aspheric surface measurement method, the interferometer is capable of measuring a surface with a high aspheric surface degree or a wavefront, and without the need of a zero compensation mirror. In addition, the method does not need a complex and usually expensive multi-dimensional movement platform.


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