The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 23, 2015
Filed:
Aug. 13, 2013
Judith A. Moroco, Sharon, PA (US);
Advanced Technology Materials, Inc., Danbury, CT (US);
Dennis Brestovansky, Newtown, CT (US);
Michael J. Wodjenski, New Milford, CT (US);
Jose I. Arno, Brookfield, CT (US);
J. Donald Carruthers, Fairfield, CT (US);
Philip A. Moroco, Sharon, PA (US);
ENTEGRIS, INC., Billerica, MA (US);
Abstract
A fluid storage and dispensing apparatus including a fluid storage and dispensing vessel having a rectangular parallelepiped shape, and an integrated gas cabinet assembly including such fluid storage and dispensing apparatus and/or a point-of-use ventilation gas scrubber in the vented gas cabinet. By the use of physical adsorbent and chemical sorbent media, the gas cabinet can be enhanced in safety of operation, e.g., where the process gas supplied from the gas cabinet is of a toxic or otherwise hazardous character.