The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 16, 2015

Filed:

Mar. 14, 2013
Applicant:

Mitsubishi Materials Corporation, Tokyo, JP;

Inventors:

Toshihiro Doi, Naka, JP;

Hideaki Sakurai, Naka, JP;

Toshiaki Watanabe, Sanda, JP;

Nobuyuki Soyama, Naka, JP;

Assignee:
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
C04B 35/491 (2006.01); H01B 3/12 (2006.01); H01L 41/187 (2006.01); C23C 18/12 (2006.01);
U.S. Cl.
CPC ...
H01L 41/1876 (2013.01); C23C 18/1216 (2013.01); C23C 18/1254 (2013.01);
Abstract

When a ferroelectric thin film-forming sol-gel solution contains a PZT-based compound, a viscosity-adjusting macromolecular compound including polyvinylpyrrolidone, and an organic dopant including a formamide-based solvent, the PZT-based compound is included at 17 mass % or more in terms of an oxide, the molar ratio of the polyvinylpyrrolidone to the PZT-based compound is PZT-based compound:polyvinylpyrrolidone=1:0.1 to 0.5 in terms of a monomer, and the formamide-based solvent is included at 3 mass % to 13 mass % of the sol-gel solution, it is possible to form a thick layer by coating the sol-gel solution once, the production efficiency improves, and crack-free and dense film formation even after calcination and firing becomes possible.


Find Patent Forward Citations

Loading…