The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 9059222 B1

PDF
Full Text
Expired
Date of Patent:
Jun. 16, 2015

Filed:

Dec. 24, 2008
Applicants:

Tae Young OH, Gyeonggi-do, KR;

Geon Yong Kim, Gyeonggi-do, KR;

Eun Ha Lee, Gyeonggi-do, KR;

Inventors:

Tae Young Oh, Gyeonggi-do, KR;

Geon Yong Kim, Gyeonggi-do, KR;

Eun Ha Lee, Gyeonggi-do, KR;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B08B 3/12 (2006.01); H01L 21/677 (2006.01); H01L 21/67 (2006.01); B08B 3/00 (2006.01); B08B 5/02 (2006.01); H01L 21/02 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67051 (2013.01); H01L 21/02096 (2013.01); H01L 21/02054 (2013.01); H01L 21/02057 (2013.01); H01L 21/0206 (2013.01); B08B 3/12 (2013.01); B08B 3/003 (2013.01); B08B 5/023 (2013.01); B22F 2998/00 (2013.01);
Abstract

The present invention relates a washing device and a method for fabricating the same which has good chemical resistance and can prevent a scratch from forming on a substrate. The washing device includes a substrate entry guide for making a substrate to enter in a right direction from an outside of the washing device, a foreign matter removal unit for receiving the substrate from the substrate entry guide unit and removing foreign matters from the substrate, a foreign matter washing unit for receiving the substrate from the foreign matter removal unit and washing remained foreign matters from the substrate, and a position control unit for controlling a position of the substrate moving out of the foreign matter washing unit, wherein the substrate entry guide, the foreign matter removal unit, the foreign matter washing unit, and the position control unit are formed of metallic porous material.


Find Patent Forward Citations

Oh, Tae. (2015). Washing device and method for fabricating the same (U.S. Patent No. 9059222). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/9059222

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