The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 16, 2015
Filed:
Dec. 26, 2007
Masahisa Ueda, Susono, JP;
Takashi Kurimoto, Susono, JP;
Michio Ishikawa, Susono, JP;
Koukou Suu, Susono, JP;
Toshiya Yogo, Kasugai, JP;
Masahisa Ueda, Susono, JP;
Takashi Kurimoto, Susono, JP;
Michio Ishikawa, Susono, JP;
Koukou Suu, Susono, JP;
Toshiya Yogo, Kasugai, JP;
Ulvac, Inc., Kanagawa, JP;
Abstract
Disclosed is an ashing apparatus and its method of manufacture wherein decrease in processing efficiency is suppressed. Specifically, a shower plate is arranged to face a substrate stage on which a substrate is placed, and diffuses oxygen radicals supplied into a chamber. A metal blocking plate is arranged between the shower plate and the substrate stage and has a through hole through which oxygen radicals pass. In addition, the metal blocking plate has a first layer, which is made of a metal same as the one exposed in the substrate, on the surface facing the substrate.