The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 9059052 B1

PDF
Full Text
Expired
Date of Patent:
Jun. 16, 2015

Filed:

May. 16, 2013
Applicant:

International Business Machines Corporation, Armonk, NY (US);

Inventors:

Fen Chen, Williston, VT (US);

Cathryn J. Christiansen, Huntington, VT (US);

Roger A. Dufresne, Fairfax, VT (US);

Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01R 31/26 (2014.01); H01L 21/66 (2006.01);
U.S. Cl.
CPC ...
H01L 22/14 (2013.01); H01L 22/34 (2013.01);
Abstract

Kerf areas are located between the integrated circuit chips on a wafer. Via chain test structures are located in the kerf areas or test chips. The via chain test structures comprise a first conductor in a first area of the wafer. First via chains are connected at individual points to the first conductor. Each of the first via chains comprises an open-ended electrical circuit beginning at the first conductor and ending in an insulated region of a second area of the wafer. The via chain test structures comprise a second conductor in the second area. Second via chains are connected at individual points to the second conductor. Each of the second via chains comprises an open-ended electrical circuit beginning at the second conductor and ending in an insulated region of the first area.


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