The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 16, 2015
Filed:
Nov. 06, 2012
International Business Machines Corporation, Armonk, NY (US);
Vishal Chhabra, Fishkill, NY (US);
Laertis Economikos, Wappingers Falls, NY (US);
John A. Fitzsimmons, Poughkeepsie, NY (US);
James Hannah, Ossining, NY (US);
Mahmoud Khojasteh, Poughkeepsie, NY (US);
Jennifer Muncy, Ridgefield, CT (US);
International Business Machines Corporation, Armonk, NY (US);
Abstract
Cleaning solutions and processes for cleaning semiconductor devices or semiconductor tooling during manufacture thereof generally include contacting the semiconductor devices or semiconductor tooling with an acidic aqueous cleaning solution free of a fluorine containing compound, the acidic aqueous cleaning solution including at least one antioxidant and at least one non-oxidizing acid.