The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 09, 2015

Filed:

Jun. 30, 2014
Applicant:

Micron Technology, Inc., Boise, ID (US);

Inventors:

Jaydip Guha, Boise, ID (US);

Shyam Surthi, Boise, ID (US);

Suraj J. Mathew, Boise, ID (US);

Kamal M. Karda, Boise, ID (US);

Hung-Ming Tsai, Boise, ID (US);

Assignee:

Micron Technology, Inc., Boise, ID (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/8238 (2006.01); H01L 21/336 (2006.01); H01L 21/8234 (2006.01); H01L 27/108 (2006.01); H01L 29/66 (2006.01); H01L 29/417 (2006.01); H01L 27/11 (2006.01);
U.S. Cl.
CPC ...
H01L 21/823487 (2013.01); H01L 27/1104 (2013.01); H01L 27/108 (2013.01); H01L 29/66666 (2013.01); H01L 27/10876 (2013.01); H01L 29/66825 (2013.01); H01L 29/66833 (2013.01); H01L 29/41741 (2013.01);
Abstract

Trenches are formed into semiconductive material. Masking material is formed laterally over at least elevationally inner sidewall portions of the trenches. Conductivity modifying impurity is implanted through bases of the trenches into semiconductive material there-below. Such impurity is diffused into the masking material received laterally over the elevationally inner sidewall portions of the trenches and into semiconductive material received between the trenches below a mid-channel portion. An elevationally inner source/drain is formed in the semiconductive material below the mid-channel portion. The inner source/drain portion includes said semiconductive material between the trenches which has the impurity therein. A conductive line is formed laterally over and electrically coupled to at least one of opposing sides of the inner source/drain. A gate is formed elevationally outward of and spaced from the conductive line and laterally adjacent the mid-channel portion. Other embodiments are disclosed.


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