The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 9054213 B1

PDF
Full Text
Expired
Date of Patent:
Jun. 09, 2015

Filed:

Sep. 30, 2014
Applicant:

Taiwan Semiconductor Manufacturing Company, Ltd., Hsin-Chu, TW;

Inventors:

Andrew Joseph Kelly, Hengshan Township, TW;

Yasutoshi Okuno, Hsin-Chu, TW;

Pei-Shan Chien, Keelung, TW;

Wei-Hsiung Tseng, New Taipei, TW;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 29/78 (2006.01); H01L 21/8234 (2006.01); H01L 21/285 (2006.01);
U.S. Cl.
CPC ...
H01L 21/823431 (2013.01); H01L 29/7845 (2013.01); H01L 21/823481 (2013.01); H01L 21/823437 (2013.01); H01L 21/28556 (2013.01);
Abstract

A gate stressor for a fin field effect transistor (FinFET) device is provided. The gate stressor includes a floor, a first stressor sidewall, and a second stressor sidewall. The floor is formed on a first portion of a gate layer. The gate layer is disposed above a shallow trench isolation (STI) region. The first stressor sidewall formed on a second portion of the gate layer. The second portion of the gate layer is disposed on sidewalls of a fin. The second stressor sidewall formed on the third portion of the gate layer. The third portion of the gate layer is disposed on sidewalls of a structure spaced apart from the fin. The first stressor side wall and the second stressor sidewall do not exceed a height of the fin.


Find Patent Forward Citations

Kelly, Andrew. (2015). Finfet with metal gate stressor (U.S. Patent No. 9054213). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/9054213

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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