The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 09, 2015

Filed:

Nov. 11, 2013
Applicant:

International Business Machines Corporation, Armonk, NY (US);

Inventors:

Essam Mina, South Burlington, VT (US);

Guoan Wang, Lexington, SC (US);

Wayne H. Woods, Jr., Burlington, VT (US);

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/768 (2006.01); H01L 23/498 (2006.01); G06F 17/50 (2006.01);
U.S. Cl.
CPC ...
H01L 21/768 (2013.01); Y10T 29/49123 (2015.01); H01L 23/49827 (2013.01); G06F 17/505 (2013.01); H01L 2924/0002 (2013.01);
Abstract

A high performance on-chip vertical coaxial cable structure, method of manufacturing and design structure thereof is provided. The coaxial cable structure includes an inner conductor and an insulating material that coaxially surrounds the inner conductor. The structure further includes an outer conductor which surrounds the insulating material. Both the inner and outer conductors comprise a plurality of metal layers formed on different wiring levels and interconnected between the different wiring levels by conductors. The coaxial cable structure is formed upon a surface of a semiconductor substrate and is oriented in substantially perpendicular alignment with the surface.


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