The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 09, 2015
Filed:
Jan. 20, 2012
Applicants:
Isao Sugaya, Kawasaki, JP;
Junichi Chonan, Fukaya, JP;
Hidehiro Maeda, Yokohama, JP;
Inventors:
Assignee:
NIKON CORPORATION, Tokyo, JP;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B29C 65/78 (2006.01); H01L 21/67 (2006.01); H01L 21/18 (2006.01); H01L 21/683 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67092 (2013.01); H01L 21/187 (2013.01); H01L 21/6833 (2013.01);
Abstract
Provided is a substrate holder system comprising a first substrate holder that holds a first substrate; an engaging member provided on the first substrate holder; a second substrate holder that holds a second substrate and can, together with the first substrate holder, sandwich the first substrate and the second substrate; an engagement receiving member that is provided on the second substrate holder and engages with the engaging member; and a dust restricting means for restricting generation of dust caused by the engagement of the engaging member and the engagement receiving member.