The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 02, 2015
Filed:
Oct. 17, 2013
Fei Company, Hillsboro, OR (US);
Erik René Kieft, Eindhoven, NL;
Fredericus Bernardus Kiewiet, Eindhoven, NL;
Adam Christopher Lassise, Utrecht, NL;
Otger Jan Luiten, Eindhoven, NL;
Petrus Henricus Antonius Mutsaers, Geldrop, NL;
Edgar Jan Dirk Vredenbregt, Eindhoven, NL;
Alexander Henstra, Utrecht, NL;
FEI COMPANY, Hillsboro, OR (US);
Abstract
The invention relates to a charged-particle microscope comprising The beam pulsing device comprises a unitary resonant cavity disposed about a particle-optical axis and has an entrance aperture and an exit aperture for the beam. The resonant cavity is configured to simultaneously produce a first oscillatory deflection of the beam at a first frequency in a first direction and a second oscillatory deflection of the beam at a second, different frequency in a second, different direction. The resonant cavity may have an elongated (e.g. rectangular or elliptical) cross-section, with a long axis parallel to said first direction and a short axis parallel to said second direction.