The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 02, 2015

Filed:

Dec. 29, 2011
Applicants:

Hiroshi Someya, Hiratsuka, JP;

Yukio Watanabe, Hiratsuka, JP;

Katsuhiko Wakana, Oyama, JP;

Osamu Wakabayashi, Hiratsuka, JP;

Inventors:

Hiroshi Someya, Hiratsuka, JP;

Yukio Watanabe, Hiratsuka, JP;

Katsuhiko Wakana, Oyama, JP;

Osamu Wakabayashi, Hiratsuka, JP;

Assignee:

GIGAPHOTON INC., Tochigi, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02B 7/182 (2006.01); G02B 7/18 (2006.01); G03F 7/20 (2006.01);
U.S. Cl.
CPC ...
G02B 7/181 (2013.01); G03F 7/70033 (2013.01); G03F 7/70175 (2013.01);
Abstract

A mirror device may include: a mirror including a base plate, a reflective film on a first surface of the base plate, and a plurality of first protrusions on a second surface of the base plate; a plurality of support parts for respectively supporting the plurality of the first protrusions, each support part having a groove formed therein for guiding the first protrusion; and a plurality of clamps for respectively pressing the plurality of the first protrusions against the respective grooves in the plurality of the support parts.


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