The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 02, 2015
Filed:
Dec. 28, 2007
Applicants:
Aaron Francis, San Jose, CA (US);
John Schmidt, Oakland, CA (US);
Kenneth Alfred Williams, Livermore, CA (US);
Inventors:
Aaron Francis, San Jose, CA (US);
John Schmidt, Oakland, CA (US);
Kenneth Alfred Williams, Livermore, CA (US);
Assignee:
Intermolecular, Inc., San Jose, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B05C 5/00 (2006.01); C40B 60/00 (2006.01); B05C 3/20 (2006.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
B05C 3/20 (2013.01); H01L 21/6704 (2013.01); H01L 21/67051 (2013.01); H01L 21/6708 (2013.01); H01L 21/6715 (2013.01); H01L 21/67207 (2013.01);
Abstract
A vented combinatorial processing cell is described, including a sleeve having an end forming a fluid seal with a region of a substrate, a flow head including a vent and disposed in the sleeve to dispense fluid onto the region, the flow head, the substrate, and the sleeve defining a chamber for processing the region, a fluid source attached to the flow head to deliver the fluid into the chamber, and a vacuum port attached to the flow head to remove fluid from the chamber.