The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 26, 2015
Filed:
Feb. 02, 2011
Masaru Hori, Nagoya, JP;
Masafumi Ito, Nagoya, JP;
Yasuhiro Higashijima, Nagoya, JP;
Takayuki Ohta, Nagoya, JP;
Masaru Hori, Nagoya, JP;
Masafumi Ito, Nagoya, JP;
Yasuhiro Higashijima, Nagoya, JP;
Takayuki Ohta, Nagoya, JP;
NATIONAL UNIVERSITY CORPORATION NAGOYA UNIVERSITY, Nagoya-Shi, Aichi, JP;
NU SYSTEM CORPORATION, Nagoya-Shi, Aichi, JP;
MEIJO UNIVERSITY, Nagoya-Shi, Aichi, JP;
Abstract
[Problem to be Solved] To improve the measurement accuracy of an interference measurement device which utilizes interference of light. [Means for Solution] An interference measurement device includes a light sourcefor emitting supercontinuum light (SC light), an optical fiber couplerfor splitting the SC light into measurement light and reference light, a dispersion compensation element, a drive unitfor moving the dispersion compensation element, and light-receiving meansfor measuring an interference waveform produced as a result of interference between the measurement light and the reference light. A measurement objectto be measured is an Si substrate having a thickness of 800 μm. The dispersion compensation elementis an Si substrate having a thickness of 780 μm. Namely, the dispersion compensation elementis formed of the same material as that of the measurement objectand is 20 μm thinner than the measurement object. The interference caused by reflection on the back surface of the measurement objectand reflection on the back surface of the dispersion compensation elementhas a narrow peak width because wavelength dispersion is cancelled almost completely. Thus, the accuracy in measuring the peak position improves. As a result, the accuracy in measuring temperature, etc., improves.