The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 26, 2015

Filed:

Oct. 08, 2010
Applicants:

Michael Colgan, Flanders, NJ (US);

Michael J. Kotelyanskii, Chatham, NJ (US);

Christopher J. Morath, Basking Ridge, NJ (US);

Humphrey J. Maris, Barrington, RI (US);

Inventors:

Michael Colgan, Flanders, NJ (US);

Michael J. Kotelyanskii, Chatham, NJ (US);

Christopher J. Morath, Basking Ridge, NJ (US);

Humphrey J. Maris, Barrington, RI (US);

Assignees:

Rudolph Technologies, Inc., Flanders, NJ (US);

Brown University, Providence, RI (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 21/00 (2006.01); G01N 29/24 (2006.01); G01N 29/04 (2006.01); G01N 29/12 (2006.01); B82Y 20/00 (2011.01); B82Y 35/00 (2011.01); G01Q 60/22 (2010.01);
U.S. Cl.
CPC ...
G01N 29/2418 (2013.01); G01N 29/041 (2013.01); G01N 29/12 (2013.01); G01N 2291/0423 (2013.01); B82Y 20/00 (2013.01); B82Y 35/00 (2013.01); G01Q 60/22 (2013.01);
Abstract

A system for imposing and analyzing surface acoustic waves in a substrate to determine characteristics of the substrate is disclosed. Optical elements and arrangements for imposing and analyzing surface acoustic waves in a substrate are also disclosed. NSOM's, gratings, and nanolight elements may be used to impose surface acoustic waves in a substrate and may also be used to measure transient changes in the substrate due to the passage of surface acoustic waves therethrough.


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