The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 26, 2015

Filed:

Mar. 29, 2012
Applicants:

Yuichiro Shimizu, Nagano, JP;

Ryo Fukasawa, Nagano, JP;

Inventors:

Yuichiro Shimizu, Nagano, JP;

Ryo Fukasawa, Nagano, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 23/498 (2006.01); H05K 3/38 (2006.01); H05K 1/09 (2006.01); H05K 3/46 (2006.01); H01L 21/48 (2006.01); H05K 3/10 (2006.01);
U.S. Cl.
CPC ...
H01L 23/49822 (2013.01); H05K 3/388 (2013.01); H05K 3/386 (2013.01); H05K 1/09 (2013.01); H05K 3/108 (2013.01); H05K 3/389 (2013.01); H05K 3/4644 (2013.01); H05K 2203/0338 (2013.01); H01L 21/4857 (2013.01); H01L 2224/16225 (2013.01); H01L 2224/32225 (2013.01); H01L 2224/73204 (2013.01); H01L 2924/15311 (2013.01);
Abstract

A method of manufacturing a wiring substrate, includes obtaining a laminated body in which a first copper tin alloy layer and a copper layer are arranged in sequence on a first coupling agent layer, on a first insulating resin layer, forming a seed layer on the copper layer, forming a plating resist in which an opening portion is provided on the seed layer, forming a metal plating layer in the opening portion of the plating resist by applying an electroplating that utilizes the seed layer as a plating power feeding path, removing the plating resist, and forming a first wiring layer on the first coupling agent layer by etching the seed layer, the copper layer, and the first copper tin alloy layer while using the metal plating layer as a mask.


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