The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 26, 2015
Filed:
Feb. 07, 2014
Jian Yin, Bridgewater, NJ (US);
Hengpeng Wu, Hillsborough, NJ (US);
Muthiah Thiyagarajan, Bridgewater, NJ (US);
Sungeun Hong, Basking Ridge, NJ (US);
Mark Neisser, Whitehouse Station, NJ (US);
Yi Cao, Clinton, NJ (US);
Jian Yin, Bridgewater, NJ (US);
Hengpeng Wu, Hillsborough, NJ (US);
Muthiah Thiyagarajan, Bridgewater, NJ (US);
SungEun Hong, Basking Ridge, NJ (US);
Mark Neisser, Whitehouse Station, NJ (US);
Yi Cao, Clinton, NJ (US);
AZ ELECTRONIC MATERIALS (LUXEMBOURG) S.A.R.L., Luxembourg, LU;
Abstract
The present invention relates to a method for treating a block copolymer solution, wherein the method comprises: providing a solution comprising a block copolymer in a non aqueous solvent; and, treating the solution to remove metals using an ion exchange resin. The invention also relates to a method of forming patterns using the treated block copolymer.