The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 26, 2015
Filed:
Dec. 18, 2013
Tokyo Ohka Kogyo Co., Ltd., Kawasaki-shi, JP;
Tokyo Ohka Kogyo Co., Ltd., Kawasaki-shi, JP;
Abstract
A resist composition which generates acid upon exposure and exhibits changed solubility in a developing solution under action of acid, including a base component (A) which exhibits changed solubility in a developing solution under action of acid, and a photo-decomposable quencher (D0) containing a compound represented by general formula (d0) shown below. In the formula, Rrepresents a hydrocarbon group of 4 to 20 carbon atoms which may have a substituent; Yrepresents a single bond or a divalent linking group; Rand Reach independently represents a substituent of 0 to 20 carbon atoms other than a fluorine atom; one of Rand Rmay form a ring with Y; Mrepresents an organic cation having a valency of m; and m represents an integer of 1 or more.