The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 26, 2015
Filed:
Feb. 23, 2010
Applicants:
Kenji Kuroiwa, Soka, JP;
Kazuaki Nagashima, Soka, JP;
Masaru Kato, Soka, JP;
Masahiro Nohara, Osaka, JP;
Inventors:
Kenji Kuroiwa, Soka, JP;
Kazuaki Nagashima, Soka, JP;
Masaru Kato, Soka, JP;
Masahiro Nohara, Osaka, JP;
Assignee:
Kanto Kagaku Kabushiki Kaisha, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C03C 25/68 (2006.01); C23F 1/20 (2006.01); C23F 1/26 (2006.01); C23F 1/44 (2006.01); H01L 21/3213 (2006.01);
U.S. Cl.
CPC ...
C23F 1/20 (2013.01); C23F 1/26 (2013.01); C23F 1/44 (2013.01); H01L 21/32134 (2013.01);
Abstract
Disclosed are etching solution compositions that comprise fluorine compounds and iron ions, which are used for bulk etching of metal laminate films wherein a layer comprising aluminum or an aluminum alloy is laminated on top and a layer comprising titanium or a titanium alloy on bottom, and an etching method using said etching solution compositions.