The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 19, 2015

Filed:

Oct. 19, 2012
Applicant:

National Applied Research Laboratories, Taipei, TW;

Inventors:

Ming-Hsing Shen, Hsinchu, TW;

Chi-Hung Huang, Hsinchu, TW;

Wei-Chung Wang, Hsinchu, TW;

Yung-Hsiang Chen, Hsinchu, TW;

Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01B 11/02 (2006.01); G01B 9/02 (2006.01); G01B 11/16 (2006.01);
U.S. Cl.
CPC ...
G01B 9/0203 (2013.01); G01B 11/161 (2013.01); G01B 9/02087 (2013.01);
Abstract

A system of computing surface reconstruction, in-plane and out-of-plane displacements and strain distribution utilizes the optical switching element to switch the reference beam to analyze the images of the test object before and after deformation, to measure the topography, in-plane and out-of-plane displacements and surface two-dimensional strain distribution on the test surface of the test object, and thus to increase the measurement range on the test surface of the test object with the use of image registration. Thereby, the complexity and error of scanning the test object can be reduced. Such a system need not to move the image capturing device or test object to generate relative displacement for reaching the measurement effect of the test surface of the test object in three-dimensional coordinates.


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