The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 19, 2015

Filed:

Jun. 14, 2012
Applicants:

Robertus Wilhelmus Veltman, Wijchen, NL;

Dennis Jozef Maria Paulussen, Eindhoven, NL;

Maarten Kees Jan Boon, Moergestel, NL;

Inventors:

Robertus Wilhelmus Veltman, Wijchen, NL;

Dennis Jozef Maria Paulussen, Eindhoven, NL;

Maarten Kees Jan Boon, Moergestel, NL;

Assignee:

ASML NETHERLANDS B.V., Veldhoven, NL;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B25G 3/00 (2006.01); F16D 1/12 (2006.01); G03B 27/54 (2006.01); G03F 7/20 (2006.01); H01J 61/36 (2006.01); H01J 61/30 (2006.01);
U.S. Cl.
CPC ...
G03F 7/70833 (2013.01); H01J 61/36 (2013.01); H01J 61/30 (2013.01); G03F 7/70975 (2013.01); G03F 7/70033 (2013.01); G03B 27/54 (2013.01);
Abstract

A clamping device is constructed and arranged to clamp two parts together. The clamping device includes an aligner constructed and arranged to bring the two parts in an aligned position with respect to each other, a clamp constructed and arranged to maintain the two parts in the aligned position, a disconnect constructed and arranged to guide the two parts away from the aligned position to a disconnected position, and an actuator constructed and arranged to convert an electrical current to kinetic energy. The aligner, the clamp, and the disconnect are constructed and arranged to be driven by the actuator.


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