The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 19, 2015
Filed:
May. 29, 2013
Applicant:
Jeol Ltd., Tokyo, JP;
Inventor:
Mitsuru Yamada, Tokyo, JP;
Assignee:
JEOL Ltd., Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 29/64 (2006.01); H01J 37/147 (2006.01); H01J 37/153 (2006.01); H01J 37/28 (2006.01);
U.S. Cl.
CPC ...
H01J 29/64 (2013.01); H01J 37/1471 (2013.01); H01J 37/153 (2013.01); H01J 37/28 (2013.01); H01J 2237/1501 (2013.01); H01J 2237/1532 (2013.01);
Abstract
A method of axially aligning a charged particle beam implemented by a charged particle beam system equipped with an astigmatic correction lens including a first pair of coils and a second pair of coils. The method starts with obtaining first to sixth sets of image data while varying currents flowing through the first to fourth coils according to first to sixth sets of conditions. Then, the values of the currents through the first to fourth coils for correcting the position of the axis of the beam are calculated based on the first to sixth sets of image data.