The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 19, 2015

Filed:

Jun. 28, 2013
Applicants:

Fuchita Nanotechnology Ltd., Chiba, JP;

National University Corporation Nagoya University, Aichi, JP;

Inventors:

Eiji Fuchita, Chiba, JP;

Yasutoshi Iriyama, Aichi, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B05D 1/12 (2006.01); C23C 24/02 (2006.01);
U.S. Cl.
CPC ...
B05D 1/12 (2013.01); C23C 24/02 (2013.01);
Abstract

A deposition method includes placing fine particles in an airtight container, the fine particles being obtained by forming a coating layer on a surface of a matrix, the coating layer being more liable to be charged than the matrix with respect to a material of a conveying path, generating an aerosol of the fine particles by introducing a career gas into the airtight container, transporting the aerosol via a transfer tubing to a deposition chamber which is maintained at a pressure lower than that in the airtight container while charging the fine particles by friction with the inner surface of the transfer tubing, the transfer tubing being connected to the airtight container and having a nozzle at the tip, and depositing the charged fine particles on a substrate placed in the deposition chamber by spraying the aerosol from the nozzle.


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