The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 19, 2015

Filed:

May. 01, 2009
Applicants:

Min Zheng, Milpitas, CA (US);

Kunliang Zhang, Fremont, CA (US);

Min LI, Dublin, CA (US);

Inventors:

Min Zheng, Milpitas, CA (US);

Kunliang Zhang, Fremont, CA (US);

Min Li, Dublin, CA (US);

Assignee:

Headway Technologies, Inc., Milpitas, CA (US);

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
C23C 14/58 (2006.01); C23C 14/14 (2006.01); C23C 14/02 (2006.01); G01R 33/09 (2006.01); G11B 5/31 (2006.01); G11B 5/39 (2006.01);
U.S. Cl.
CPC ...
C23C 14/5833 (2013.01); C23C 14/5873 (2013.01); C23C 14/14 (2013.01); C23C 14/025 (2013.01); G01R 33/098 (2013.01); G11B 5/3163 (2013.01); G11B 5/3932 (2013.01);
Abstract

A hard bias (HB) structure for longitudinally biasing a free layer in a MR sensor is disclosed that includes a mildly etched seed layer and a hard bias (HB) layer on the etched seed layer. The HB layer may contain one or more HB sub-layers stacked on a lower sub-layer which contacts the etched seed layer. Each HB sub-layer is mildly etched before depositing another HB sub-layer thereon. The etch may be performed in an IBD chamber and creates a higher concentration of nucleation sites on the etched surface thereby promoting a smaller HB average grain size than would be realized with no etch treatments. A smaller HB average grain size is responsible for increasing Hcr in a CoPt HB layer to as high as 2500 to 3000 Oe. Higher Hcr is achieved without changing the seed layer or HB material and without changing the thickness of the aforementioned layers.


Find Patent Forward Citations

Loading…