The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 12, 2015
Filed:
May. 01, 2013
Applicant:
Asm Ip Holding B.v., Almere, NL;
Inventors:
Robert Brennan Milligan, Gold Canyon, AZ (US);
Fred Alokozai, Scottsdale, AZ (US);
Assignee:
ASM IP Holding B.V., Almere, NL;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/20 (2006.01); H01L 29/49 (2006.01); H01L 29/40 (2006.01); H01L 21/28 (2006.01); H01L 21/44 (2006.01); H01L 29/51 (2006.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
H01L 29/4908 (2013.01); H01L 29/401 (2013.01); H01L 21/28088 (2013.01); H01L 29/4966 (2013.01); H01L 29/517 (2013.01); H01L 21/67167 (2013.01); H01L 21/67253 (2013.01);
Abstract
Nitrogen-containing phase-stabilized films, methods of forming phase-stabilized films, and structures and devices including the phase-stabilized films are disclosed. The phase-stabilized films include a matrix material and a phase stabilizer, which provides a morphologically stabilizing effect to a matrix material within the films. The phase-stabilized films may be used as, for example, gate electrodes and similar films in microelectronic devices.
Published as: