The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 12, 2015

Filed:

Oct. 11, 2012
Applicant:

International Business Machines Corporation, Armonk, NY (US);

Inventors:

Paul S. Andry, Yorktown Heights, NY (US);

Russell A. Budd, Yorktown Heights, NY (US);

John U. Knickerbocker, Yorktown Heights, NY (US);

Robert E. Trzcinski, Yorktown Heights, NY (US);

Douglas C. La Tulipe, Jr., Yorktown Heights, NY (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/30 (2006.01); H01L 21/46 (2006.01); H01L 23/498 (2006.01); H01L 29/00 (2006.01); H01L 21/02 (2006.01); H01L 21/683 (2006.01); H01L 21/20 (2006.01);
U.S. Cl.
CPC ...
H01L 23/49827 (2013.01); H01L 29/00 (2013.01); H01L 21/02 (2013.01); H01L 21/6835 (2013.01); H01L 2221/68318 (2013.01); H01L 2221/68327 (2013.01); H01L 2221/6834 (2013.01); H01L 2221/68381 (2013.01); H01L 2924/0002 (2013.01); H01L 21/2007 (2013.01);
Abstract

A method for processing a semiconductor wafer includes applying a release layer to a transparent handler. An adhesive layer, that is distinct from the release layer, is applied between a semiconductor wafer and the transparent handler having the release layer applied thereon. The semiconductor wafer is bonded to the transparent handler using the adhesive layer. The semiconductor wafer is processed while it is bonded to the transparent handler. The release layer is ablated by irradiating the release layer through the transparent handler with a laser. The semiconductor wafer is removed from the transparent handler.


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