The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 12, 2015

Filed:

May. 26, 2014
Applicant:

Pfc Device Corp., New Taipei, TW;

Inventors:

Mei-Ling Chen, New Taipei, TW;

Hung-Hsin Kuo, New Taipei, TW;

Kuo-Liang Chao, New Taipei, TW;

Assignee:

PFC Device Corp., New Taipei, TW;

Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/76 (2006.01); H01L 21/336 (2006.01); H01L 29/812 (2006.01); H01L 21/8249 (2006.01); H01L 29/76 (2006.01); H01L 21/762 (2006.01); H01L 29/66 (2006.01); H01L 29/861 (2006.01); H01L 21/761 (2006.01); H01L 29/80 (2006.01); H01L 29/94 (2006.01);
U.S. Cl.
CPC ...
H01L 21/76224 (2013.01); H01L 29/66136 (2013.01); H01L 29/861 (2013.01); H01L 21/761 (2013.01); H01L 29/66174 (2013.01); H01L 29/66477 (2013.01); H01L 29/80 (2013.01); H01L 29/94 (2013.01); H01L 2924/13091 (2013.01); H01L 29/6609 (2013.01);
Abstract

A trench isolation metal-oxide-semiconductor (MOS) P-N junction diode device and a manufacturing method thereof are provided. The trench isolation MOS P-N junction diode device is a combination of an N-channel MOS structure and a lateral P-N junction diode, wherein a polysilicon-filled trench oxide layer is buried in the P-type structure to replace the majority of the P-type structure. As a consequence, the trench isolation MOS P-N junction diode device of the present invention has the benefits of the Schottky diode and the P-N junction diode. That is, the trench isolation MOS P-N junction diode device has rapid switching speed, low forward voltage drop, low reverse leakage current and short reverse recovery time.


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